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Scanning Probe Microscopy

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The Cambridge Centre for Gallium Nitride benefits from the facilities of the Department of Materials Science and Metallurgy’s scanning probe microscopy suite.  As of September 2017 a new instrument has recently been purchased which is part of the Cambridge spoke of the Sir Henry Royce Institute.


The instrument is a Veeco Dimension Pro, equipped for advanced metrology on semiconductor wafers up to 8 inches in diameter. Our group has extensive experience with the techniques of atomic force microscopy (AFM), Kelvin probe force microscopy (KPFM), and scanning capacitance microscopy (SCM).  The new instrument also brings new opportunities, particularly in PeakForce Tunnelling AFM and Photoconductive AFM.

 

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